Semiconductor wafer immersion systems and treatments using modulated acoustic energy
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United States of America Patent
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Issued Date -
May 12, 2005
app pub date -
Sep 10, 2004
filing date -
Sep 11, 2003
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Abandoned
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Abstract
Systems and methods in which one or more wafers are immersed in a sonified liquid during the course of a treatment wherein the sound energy imparted to the liquid is modulated during at least a portion of a treatment. The frequency and/or amplitude of the sound energy may be modulated.
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