PROBE SHEET AND PROBE SHEET UNIT USING SAME
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United States of America Patent
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Issued Date -
May 12, 2005
app pub date -
May 18, 2004
filing date -
Nov 7, 2003
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
It is an object of the present invention to provide a probe sheet capable of achieving correct measurement independently of a dispersion in height of electrodes of measurement objective; and a probe sheet unit using the same. A probe sheet unit A is a sensing section of a measuring instrument (not shown) for a measurement objective B and includes: a base plate 100 mounted to a prober of the instrument; and a probe sheet 200 mounted to a lower surface of the base plate, and the probe sheet 200 includes: a sheet member 210 having a flexibility; and plural probes 220 for measurement provided on one surface of the sheet member 210, wherein a probe 220 has a shape capable of elastic deformation in a direction, upward or downward.
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