Tunable filter membrane structures and methods of making
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United States of America Patent
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N/A
Issued Date -
May 19, 2005
app pub date -
Oct 7, 2004
filing date -
Oct 7, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An optical device including: a substrate with a top surface and a bottom surface and a hole extending through the substrate from the top surface to the bottom surface; and a multilayered thin film structure fabricated on the substrate and forming a membrane over the hole, the multilayered thin film structure including a thermally tunable thin film optical filter structure at least a portion of which is positioned over the hole.
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