Plasma resistant curable fluoroelastomer composition
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United States of America Patent
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Issued Date -
May 19, 2005
app pub date -
Oct 12, 2004
filing date -
Nov 13, 2003
priority date (Note) -
Abandoned
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Abstract
A fluoroelastomer composition comprising a) a fluoroelastomer, b) a curative and c) barium sulfate having an average particle size less than 200 nm is disclosed. This composition loses less weight and produces fewer particles when exposed to reactive plasmas than do similar compositions which contain larger particle size barium sulfate.
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