Functional porous film, sensor, method of manufacturing functional porous film, method of manufacturing porous metal film, and method of manufacturing sensor
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United States of America Patent
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Issued Date -
May 26, 2005
app pub date -
Oct 26, 2004
filing date -
Oct 28, 2003
priority date (Note) -
Abandoned
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Abstract
Provided are a functional porous film having a plurality of functions, a method of manufacturing the same, and a sensor using the same. In the functional porous film, a functional portion having a different function from a porous body is disposed on the inner wall of a pore of the porous body. The functional porous film is formed through forming a precursor film including a pore-forming powder such as an organic powder on which a material powder of the functional portion is deposited and a material powder of the porous body, and then heating the precursor film to remove the pore-forming powder and sinter the material powder of the porous body.
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