Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system
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United States of America Patent
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Issued Date -
May 26, 2005
app pub date -
Nov 10, 2004
filing date -
Nov 10, 2003
priority date (Note) -
Abandoned
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Abstract
Methods and systems are provided for reducing the effects of vibration in a vacuum-based semiconductor handling system, including methods and systems for tapering robotic arm components and tapering end effectors of robotic arm components to reduce vibration in the same.
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