High selectivity colloidal silica slurry
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 15, 2005
Grant Date -
May 26, 2005
app pub date -
Nov 21, 2003
filing date -
Nov 21, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Provided is a novel high selectivity aqueous slurry composition method of utilizing same. The composition includes non-modified silica based abrasive particles in an amount of about 5 to about 50 weight percent, and an organic compound in an amount of about 0.001 to about 2.0 weight percent in an aqueous solution, wherein the silicon oxide to silicon nitride selectivity ratio ranges from about 50 to about 700.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully