Method of processing a workpiece
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United States of America Patent
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N/A
Issued Date -
Jun 2, 2005
app pub date -
Nov 29, 2004
filing date -
Nov 29, 2003
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A method of processing a workpiece in a chamber with a reactive gas supplied to the chamber creating a chamber pressure including positioning the workpiece on a support in the chamber with a first face exposed to the reactive gas, supplying a non-reactive gas between the support and a second face of the workpiece, and controlling the differential gas pressure across the thickness of the workpiece.
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Cited Art Landscape
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