Sensor device for non-intrusive diagnosis of a semiconductor processing system
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United States of America Patent
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app pub date -
Feb 7, 2005
filing date -
Mar 6, 1998
priority date (Note) -
Abandoned
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Abstract
A sensor device, for diagnosing a processing system, generally includes a support platform and one or more sensors mounted on the support platform. The sensor senses a condition, such as direction or inclination or acceleration in one or two axes, of the sensor device and outputs a signal indicative thereof, which is then transferred to a device on or near the processing system. The support platform generally has physical characteristics, such as size, profile height, mass, flexibility and/or strength, substantially similar to those of the substrates that are to be processed in the processing system, so the sensor device can be transferred through the processing system in a manner similar to the manner in which production substrates are transferred through the processing system.
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