Method and apparatus for electrochemical processing
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United States of America Patent
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Issued Date -
Jun 16, 2005
app pub date -
Sep 29, 2004
filing date -
Mar 29, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of electrochemically processing an article having a semi-insulating element and a conducting element comprises forming a conductive layer on the article, the conductive layer comprising at least a first region covering at least a portion of the semi-insulating element and a second region covering at least a portion of the conducting element; gripping with at least one conductive gripper a portion of the first region; submerging at least a portion of the second region in an electrolyte while keeping the conductive gripper out of said electrolyte; and conducting current through a circuit comprising the conducting element, the conductive layer, the conductive gripper, and an electrode submerged in the electrolyte. The conductive layer is preferably formed by diffusing a dopant from a vapor phase.
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