Laser irradiation method and method for manufacturing crystalline semiconductor film

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Oct 27, 2009
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Dec 22, 2004
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Dec 26, 2003

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SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Tanaka, Koichiro	Isehara , JP	530	11808
Yamamoto, Yoshiaki	Atsugi , JP	172	2305

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Laser irradiation method and method for manufacturing crystalline semiconductor film

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United States of America Patent

11017900

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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
October 27, 2009	US,7608527,B2 US7608527B2	GRANTED PATENT AS SECOND PUBLICATION
June 30, 2005	US,20050139786,A1 US20050139786A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7608527
SERIAL NO	11017900
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11017900

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