Physical quantity sensing element having improved structure suitable for electrical connection and method of fabricating same
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United States of America Patent
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May 29, 2007
Grant Date -
Jun 30, 2005
app pub date -
Dec 20, 2004
filing date -
Dec 25, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A physical quantity sensing element according to the invention includes an insulating layer and a sensing layer. The sensing layer is configured to generate an electrical signal as a function of a physical quantity applied thereto and has a surface that includes a first and a second area. The first area is completely covered with the insulating layer so that the physical quantity is to be applied to both the insulating layer and the sensing layer through the first area; the second area is exposed to an application direction of the physical quantity without being covered with the insulating layer and being subject to application of the physical quantity. With such a structure, easy and reliable electrical connection of the physical quantity sensing element with external devices and circuits is ensured. In addition, several practical methods of fabricating the physical quantity sensing element according to the invention are also provided.
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