Thin-film laminated body, thin-film cell, capacitor, and method and equipment for manufacturing thin-film laminated body
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United States of America Patent
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Issued Date -
Jun 30, 2005
app pub date -
Sep 17, 2004
filing date -
Mar 26, 2002
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Abandoned
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Abstract
A thin film layered product is composed of at least two deposition units, each of which includes at least a first thin film layer and a second thin film layer. At least one of the first thin film layer and the second thin film layer in each of the at least two deposition units is laminated so as to have an area decreased in a direction from a lower layer toward an upper layer. Thus, the reliability of connection between layers can be improved, and when a protective layer is formed on side faces, the formability and adhesion strength can be improved.
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