Inclination sensor, method of manufacturing inclination sensor, and method of measuring inclination
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United States of America Patent
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Issued Date -
Jul 14, 2005
app pub date -
Oct 1, 2004
filing date -
Apr 2, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A tilt sensor capable of measuring a tilt angle by utilizing piezoresistive effect without selectively etching a substrate having piezoresistors formed therein, wherein the backside of the silicon substrate 1 having piezoresistors R1 to R4 formed therein is uniformly ground to a deflectable thickness, both ends of the silicon substrate 1 are supported by a support member 2, and a weight member 3 is provided at the center of the silicon substrate 1 through a convex portion 3a.
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