Probe station with two platens
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United States of America Patent
Stats
-
May 6, 2008
Grant Date -
Jul 21, 2005
app pub date -
Jan 16, 2004
filing date -
Jan 25, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.
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Cited Art Landscape
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