Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same

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United States of America Patent

PATENT NO 8236382
APP PUB NO 20050158473A1
SERIAL NO

10882716

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Abstract

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A method for preparing a surface of a substrate is provided. The method includes scanning the surface of the substrate by a meniscus, preparing the surface of the substrate using the meniscus, and performing a next preparation operation on the surface of the substrate that was prepared without performing a rinsing operation.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
de, Larios John M Palo Alto, US 72 985
Korolik, Mikhail San Jose, US 85 4240
Ravkin, Michael Sunnyvale, US 72 1402
Smith, Michael G R Dublin, US 12 119
Woods, Carl Aptos, US 36 414

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