Offset gap control for electromagnetic devices
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United States of America Patent
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N/A
Issued Date -
Jul 28, 2005
app pub date -
Jan 22, 2004
filing date -
Jan 22, 2004
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A stage apparatus includes a first assembly including a target member, a second assembly including a first attracting member and a second attracting member located on opposite sides of the target member, and an actuator associated with the second assembly. The actuator of the stage apparatus moves the second assembly to adjust the relative distance between the target member and the first attracting member.
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