System, method, and medium for monitoring performance of an advanced process control system
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United States of America Patent
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Apr 8, 2008
Grant Date -
Aug 4, 2005
app pub date -
Jan 29, 2004
filing date -
Jan 29, 2004
priority date (Note) -
Expired
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Abstract
A method for monitoring performance of an advanced process control system for at least one process output includes calculating a variance of a prediction error for a processing performance and/or a probability for violating specification limits of the processing performance of the at least one process output. If the variance of the prediction error is calculated, the method also includes calculating a model health index. If the probability for violating specification limits is calculated, the method further includes calculating a process health index.
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