Apparatus and methods for producing electromagnetic radiation

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7781947
APP PUB NO 20050179354A1
SERIAL NO

10777995

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.

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Patent Owner(s)

Patent OwnerAddress
MATTSON TECHNOLOGY INC47131 BAYSIDE PARKWAY FREMONT CA 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO LTDNO 8 BUILDING NO 28 JINGHAI ER RD ECONOMIC AND TECHNICAL DEVELOPMENT ZONE BEIJING 100176

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Camm, David Malcolm Vancouver, CA 20 466
Chin, Chee Maple Ridge, CA 2 28
Doolan, Rick Burnaby, CA 2 28
Hewett, Tony Richmond, CA 2 28
Kjorvel, Arne Vancouver, CA 4 74
Komasa, Tony Vancouver, CA 4 62
Krasnich, Mike Richmond, CA 4 57
McCoy, Steve Burnaby, CA 11 164
Reyers, Joseph Surrey, CA 2 28
Rudic, Igor Vancouver, CA 3 56
Shepelev, Ludmila Richmond, CA 2 28
Stuart, Greg Burnaby, CA 11 239
Thrum, Tilman Richmond, CA 3 56
Viel, Alex Vancouver, CA 2 28

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