Probe card
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Aug 25, 2005
app pub date -
Feb 14, 2005
filing date -
Feb 24, 2004
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An object of the present invention is to provide a probe card capable of readily arranging a wiring pattern without forming the through hole while using a silicon substrate as a supporting substrate. The probe card comprises: a supporting substrate 100, one surface of which is formed in a pyramid shape having one step; a plurality of probes 200 arranged on the surface of a thick part of the supporting substrate 100; a plurality of bumps 110 arranged on the surface of a thin part of the supporting substrate 100; and a plurality of wiring patterns 120 which are arranged on the one surface of the supporting substrate 100 and electrically connects each of the probes 200 with each of the bumps 110.
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