US Patent Application No: 2005/0194,258

Number of patents in Portfolio can not be more than 2000

Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates

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Abstract

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Some embodiments of the present invention are directed to techniques for building up single layer or multi-layer structures on dielectric or partially dielectric substrates. Certain embodiments deposit seed layer material directly onto substrate materials while other embodiments use an intervening adhesion layer material. Some embodiments use different seed layer materials and/or adhesion layer materials for sacrificial and structural conductive building materials. Some embodiments apply seed layer and/or adhesion layer materials in what are effectively selective manners while other embodiments apply the materials in blanket fashion. Some embodiments remove extraneous depositions (e.g. depositions to regions unintended to form part of a layer) via planarization operations while other embodiments remove the extraneous material via etching operations. Other embodiments are directed to the electrochemical fabrication of multilayer mesoscale or microscale structures which are formed using at least one conductive structural material, at least one conductive sacrificial material, and at least one dielectric material. In some embodiments the dielectric material is a UV-curable photopolymer.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MICROFABRICA INC.VAN NUYS, CA71

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cohen, Adam L Los Angeles, CA 235 2152
Frodis, Uri Los Angeles, CA 40 409
Kim, Kieun Pasadena, CA 49 217
Le, Qui T Anaheim, CA 15 110
Lockard, Michael S Lake Elizabeth, CA 136 1356
McPherson, Dale S Kissimmee, FL 13 97
Smalley, Dennis R Newhall, CA 176 3873
Zhang, Gang Monterey Park, CA 114 728

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Microfabrica Inc. (3)
* 7,259,640 Miniature RF and microwave components and methods for fabricating such components 36 2002
* 7,239,219 Miniature RF and microwave components and methods for fabricating such components 35 2003
* 2005/0032,375 Methods for electrochemically fabricating structures using adhered masks, incorporating dielectric sheets, and/or seed layers that are partially removed via planarization 12 2004
 
INTEL CORPORATION (1)
* 2003/0077,871 Fabrication of on-package and on-chip structure using build-up layer process 8 2002
 
WISCONSIN ALUMNI RESEARCH FOUNDATION (1)
* 5,190,637 Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers 160 1992
 
MOTOROLA SOLUTIONS, INC. (1)
* 6,008,102 Method of forming a three-dimensional integrated inductor 210 1998
 
UNIVERSITY OF SOUTHERN CALIFORNIA (1)
* 6,027,630 Method for electrochemical fabrication 180 1998
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Virgin Islands Microsystems, Inc. (1)
7,208,712 Structures and methods for coupling energy from an electromagnetic wave 0 2005
 
ADVANCED PLASMONICS, INC. (56)
* 2006/0035,173 Patterning thin metal films by dry reactive ion etching 55 2004
7,791,290 Ultra-small resonating charged particle beam modulator 0 2005
7,626,179 Electron beam induced resonance 6 2005
7,253,426 Structures and methods for coupling energy from an electromagnetic wave 46 2005
7,361,916 Coupled nano-resonating energy emitting structures 14 2005
* 2007/0075,265 Coupled nano-resonating energy emitting structures 1 2005
7,619,373 Selectable frequency light emitter 2 2006
7,586,097 Switching micro-resonant structures using at least one director 22 2006
7,470,920 Resonant structure-based display 39 2006
7,282,776 Method and structure for coupling two microcircuits 3 2006
7,714,513 Electron beam induced resonance 6 2006
7,558,490 Resonant detector for optical signals 3 2006
7,876,793 Micro free electron laser (FEL) 3 2006
7,646,991 Selectable frequency EMR emitter 4 2006
7,579,609 Coupling light of light emitting resonator to waveguide 2 2006
7,492,868 Source of x-rays 0 2006
7,443,358 Integrated filter in antenna-based detector 38 2006
* 2007/0200,784 Integrated filter in antenna-based detector 0 2006
8,188,431 Integration of vacuum microelectronic device with integrated circuit 0 2006
7,986,113 Selectable frequency light emitter 1 2006
7,791,291 Diamond field emission tip and a method of formation 1 2006
7,746,532 Electro-optical switching system and method 0 2006
7,741,934 Coupling a signal through a window 1 2006
7,732,786 Coupling energy in a plasmon wave to an electron beam 1 2006
7,728,397 Coupled nano-resonating energy emitting structures 10 2006
7,728,702 Shielding of integrated circuit package with high-permeability magnetic material 4 2006
7,723,698 Top metal layer shield for ultra-small resonant structures 0 2006
7,718,977 Stray charged particle removal device 2 2006
7,710,040 Single layer construction for ultra small devices 3 2006
7,656,094 Electron accelerator for ultra-small resonant structures 3 2006
7,605,835 Electro-photographic devices incorporating ultra-small resonant structures 2 2006
7,586,167 Detecting plasmons using a metallurgical junction 24 2006
7,583,370 Resonant structures and methods for encoding signals into surface plasmons 3 2006
7,569,836 Transmission of data between microchips using a particle beam 10 2006
7,557,647 Heterodyne receiver using resonant structures 3 2006
7,554,083 Integration of electromagnetic detector on integrated chip 10 2006
7,476,907 Plated multi-faceted reflector 1 2006
7,442,940 Focal plane array incorporating ultra-small resonant structures 39 2006
7,443,577 Reflecting filtering cover 2 2006
7,436,177 SEM test apparatus 42 2006
7,359,589 Coupling electromagnetic wave through microcircuit 10 2006
7,342,441 Heterodyne receiver array using resonant structures 41 2006
* 2007/0258,689 COUPLING ELECTROMAGNETIC WAVE THROUGH MICROCIRCUIT 0 2006
* 2007/0257,739 Local plane array incorporating ultra-small resonant structures 0 2006
7,758,739 Methods of producing structures for electron beam induced resonance using plating and/or etching 0 2006
7,679,067 Receiver array using shared electron beam 0 2006
7,450,794 Microcircuit using electromagnetic wave routing 0 2006
7,560,716 Free electron oscillator 0 2006
7,659,513 Low terahertz source and detector 7 2006
7,688,274 Integrated filter in antenna-based detector 3 2007
7,557,365 Structures and methods for coupling energy from an electromagnetic wave 5 2007
* 2007/0170,370 Structures and methods for coupling energy from an electromagnetic wave 11 2007
7,573,045 Plasmon wave propagation devices and methods 14 2007
7,990,336 Microwave coupled excitation of solid state resonant arrays 1 2008
7,791,053 Depressed anode with plasmon-enabled devices such as ultra-small resonant structures 2 2008
8,384,042 Switching micro-resonant structures by modulating a beam of charged particles 1 2008
 
FMI TECHNOLOGIES, INC. (1)
7,655,934 Data on light bulb 0 2006
* Cited By Examiner