US Patent Application No: 2005/0194,258

Number of patents in Portfolio can not be more than 2000

Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates

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Abstract

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Some embodiments of the present invention are directed to techniques for building up single layer or multi-layer structures on dielectric or partially dielectric substrates. Certain embodiments deposit seed layer material directly onto substrate materials while other embodiments use an intervening adhesion layer material. Some embodiments use different seed layer materials and/or adhesion layer materials for sacrificial and structural conductive building materials. Some embodiments apply seed layer and/or adhesion layer materials in what are effectively selective manners while other embodiments apply the materials in blanket fashion. Some embodiments remove extraneous depositions (e.g. depositions to regions unintended to form part of a layer) via planarization operations while other embodiments remove the extraneous material via etching operations. Other embodiments are directed to the electrochemical fabrication of multilayer mesoscale or microscale structures which are formed using at least one conductive structural material, at least one conductive sacrificial material, and at least one dielectric material. In some embodiments the dielectric material is a UV-curable photopolymer.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MICROFABRICA INC.VAN NUYS, CA68

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cohen, Adam L Rancho Palos Verdes, CA 284 1617
Frodis, Uri Los Angeles, CA 46 327
Kim, Kieun Pasadena, CA 61 171
Le, Qui T Anaheim, CA 21 102
Lockard, Michael S Lake Elizabeth, CA 165 959
McPherson, Dale S Kissimmee, FL 17 85
Smalley, Dennis R Newhall, CA 212 3339
Zhang, Gang Monterey Park, CA 143 528

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Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
ADVANCED PLASMONICS, INC. (50)
7,791,290 Ultra-small resonating charged particle beam modulator 0 2005
7,626,179 Electron beam induced resonance 5 2005
7,253,426 Structures and methods for coupling energy from an electromagnetic wave 46 2005
7,361,916 Coupled nano-resonating energy emitting structures 14 2005
7,619,373 Selectable frequency light emitter 2 2006
7,586,097 Switching micro-resonant structures using at least one director 22 2006
7,470,920 Resonant structure-based display 38 2006
7,282,776 Method and structure for coupling two microcircuits 3 2006
7,714,513 Electron beam induced resonance 5 2006
7,558,490 Resonant detector for optical signals 2 2006
7,876,793 Micro free electron laser (FEL) 2 2006
7,646,991 Selectable frequency EMR emitter 3 2006
7,579,609 Coupling light of light emitting resonator to waveguide 2 2006
7,492,868 Source of x-rays 0 2006
7,443,358 Integrated filter in antenna-based detector 38 2006
8,188,431 Integration of vacuum microelectronic device with integrated circuit 0 2006
7,986,113 Selectable frequency light emitter 0 2006
7,791,291 Diamond field emission tip and a method of formation 1 2006
7,746,532 Electro-optical switching system and method 0 2006
7,741,934 Coupling a signal through a window 0 2006
7,732,786 Coupling energy in a plasmon wave to an electron beam 1 2006
7,728,397 Coupled nano-resonating energy emitting structures 6 2006
7,728,702 Shielding of integrated circuit package with high-permeability magnetic material 4 2006
7,723,698 Top metal layer shield for ultra-small resonant structures 0 2006
7,718,977 Stray charged particle removal device 2 2006
7,710,040 Single layer construction for ultra small devices 3 2006
7,656,094 Electron accelerator for ultra-small resonant structures 3 2006
7,605,835 Electro-photographic devices incorporating ultra-small resonant structures 2 2006
7,586,167 Detecting plasmons using a metallurgical junction 24 2006
7,583,370 Resonant structures and methods for encoding signals into surface plasmons 3 2006
7,569,836 Transmission of data between microchips using a particle beam 10 2006
7,557,647 Heterodyne receiver using resonant structures 3 2006
7,554,083 Integration of electromagnetic detector on integrated chip 10 2006
7,476,907 Plated multi-faceted reflector 1 2006
7,442,940 Focal plane array incorporating ultra-small resonant structures 38 2006
7,443,577 Reflecting filtering cover 2 2006
7,436,177 SEM test apparatus 42 2006
7,359,589 Coupling electromagnetic wave through microcircuit 10 2006
7,342,441 Heterodyne receiver array using resonant structures 41 2006
7,758,739 Methods of producing structures for electron beam induced resonance using plating and/or etching 0 2006
7,679,067 Receiver array using shared electron beam 0 2006
7,450,794 Microcircuit using electromagnetic wave routing 0 2006
7,560,716 Free electron oscillator 0 2006
7,659,513 Low terahertz source and detector 7 2006
7,688,274 Integrated filter in antenna-based detector 2 2007
7,557,365 Structures and methods for coupling energy from an electromagnetic wave 5 2007
7,573,045 Plasmon wave propagation devices and methods 12 2007
7,990,336 Microwave coupled excitation of solid state resonant arrays 0 2008
7,791,053 Depressed anode with plasmon-enabled devices such as ultra-small resonant structures 2 2008
8,384,042 Switching micro-resonant structures by modulating a beam of charged particles 0 2008
 
FMI TECHNOLOGIES, INC. (1)
7,655,934 Data on light bulb 0 2006
 
VIRGIN ISLAND MICROSYSTEMS, INC. (1)
7,208,712 Structures and methods for coupling energy from an electromagnetic wave 0 2005
* Cited By Examiner