Carrier for holding an object to be polished
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United States of America Patent
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Issued Date -
Sep 15, 2005
app pub date -
Mar 8, 2005
filing date -
Mar 9, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
To provide a diamond-like carbon coated carrier for holding an object to be polished used for double-sided polishing, and a manufacturing method therefor. A carrier for holding an object to be polished according to the present invention has a substrate whose entire surface is coated with diamond-like carbon. A method of the present invention includes coating the entire carrier surface with diamond-like carbon using a surface coating apparatus using plasma CVD.
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