Device and system for pressure sensing and control

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20050204824A1
SERIAL NO

10805742

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Embodiments of the present invention provide devices and systems in which pressure sensing and pressure control capabilities are integrated. One embodiment of the present invention can include a device for pressure sensing and control comprising a sensor portion operable to sense a pressure and a control portion. The control portion can be operable to compare the sensed pressure to a set point; generate a control signal based on a difference between the sensed pressure and the set point; and output the control signal. The sensor portion and the control sensor portion and control portion can be integrated in a housing.

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Patent Owner(s)

Patent OwnerAddress
MYKROLIS CORPORATIONONE PATRIOTS PARK BEDFORD MA 01730

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goodman, Daniel A Windham, NH 2 15

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