Morphology and Spectroscopy of Nanoscale Regions using X-Rays Generated by Laser Produced Plasma
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United States of America Patent
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Issued Date -
Sep 29, 2005
app pub date -
Mar 29, 2005
filing date -
Mar 29, 2004
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Abandoned
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Abstract
A system and method is disclosed for generation of a nanoplasma and/or nanofluorescence. The system includes an emissions source of soft x-rays. The emissions source can include a laser system as an energy source and target material that acts as a radiation source when illuminated by the laser system. The system further includes focusing optics particularly suited for manipulation of wavelengths associated with x-rays. The focusing optics can focus the x-rays onto a desired target so that a nanoplasma or nanofluorescent spot can be formed to have a diameter of less than 200 nm. Radiation from the nanoplasma or nanofluorescent spot can be examined, for example using a spectrometer, in order to perform a highly-selective material analysis of the desired target. Other applications include using the nanoplasma for nanoablation and/or nanodeposition processes.
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