Microfabricated hot wire vacuum sensor

United States of America Patent

Stats

Aug 8, 2006
Grant Date
Sep 29, 2005
app pub date
Mar 24, 2004
filing date
Mar 24, 2004

priority date (Note)
In Force

status (Latency Note)

Importance

Loading Importance Indicators... loading....

Abstract

A microfabricated vacuum sensor may be formed using semiconductor integrated circuit processes. The sensor may be formed inside an enclosure with a microfabricated component. The sensor may then be used to measure the pressure within the enclosure.

Loading the Abstract Image... loading....

First Claim

See full text

loading....

all claims.. loading....

Family

Loading Family data... loading....

Patent Owner(s)

INTEL CORPORATION

International Classification(s)

H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

[Classification Symbol]

[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Arana, Leonel R	Phoenix, AZ	45	701
Heck, John	Berkeley, CA	110	1901
Zou, Yuelin Lee	Phoenix, AZ	1	4

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

FREE	$9.95/mo		$39.95/mo	$99.95/mo

PAIR Watch Weekly Update		$2.75/mo/patent		$2.65/mo/patent
PAIR Watch Daily Update		$5.75/mo/patent		$5.55/mo/patent
Upgrade Now	Upgrade Now		Upgrade Now	Upgrade Now

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Watches in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

FREE	$9.95/mo		$39.95/mo	$99.95/mo

PAIR Watch Weekly Update		$2.75/mo/patent		$2.65/mo/patent
PAIR Watch Daily Update		$5.75/mo/patent		$5.55/mo/patent
Upgrade Now	Upgrade Now		Upgrade Now	Upgrade Now

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

Microfabricated hot wire vacuum sensor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10807836

Stats

Importance

Abstract

First Claim

Family

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Patent Citation Ranking

Forward Cite Landscape

Maintenance Fees

Full Text

Legal Events

Matter Detail

Renewals Detail

Load PAIR data

Payment Failure

Cancel Scheduled Update

Remove Watch on PAIR

Update PAIR data

PAIR load has been initiated

File History PDF

Add Patents to Portfolio

PATENT NO	7087451
APP PUB NO	20050212066A1
SERIAL NO	10807836
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 08, 2006	US,7087451,B2 US7087451B2	GRANTED PATENT AS SECOND PUBLICATION
September 29, 2005	US,20050212066,A1 US20050212066A1	FIRST PUBLISHED PATENT APPLICATION

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Please Confirm Your Upgraded Plan Purchase By Selecting Upgrade Button

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Please Confirm Your Upgraded Plan Purchase By Selecting Upgrade Button

10807836

Stats

Importance

Abstract

First Claim

Family

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Patent Citation Ranking

Forward Cite Landscape

Maintenance Fees

Full Text

Legal Events

Matter Detail

Renewals Detail

Load PAIR data

Payment Failure

Cancel Scheduled Update

Remove Watch on PAIR

Update PAIR data

PAIR load has been initiated

File History PDF

Add to Portfolio(s)

Important Notes on Latency of Status data

Important Note on Priority Date data