Method of producing a crosslinked coating in the manufacture of integrated circuits
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United States of America Patent
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Issued Date -
Sep 29, 2005
app pub date -
Mar 28, 2005
filing date -
Mar 26, 2004
priority date (Note) -
Abandoned
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Abstract
The present invention is directed to a method of providing a thermally curable coating composition for to provide positive photoresists layers, underlayers for multiple layer resists, antireflective coatings, bottom layer antireflective coatins, dielectric layers, photoresist layers, hard mask etch stops, in the manufacture of integrated circuits. More particularly, the present invention is directed to a method of using a thermally activable latent acid or a thermal acid generator, a N-benzylpyridinium or N-benzylanilinium salt of a strong acid, as a catalyst in a polymerizable composition suitable for preparing such coatings and layers. The present invention is also directed to novel compositions comprising benzylpyridinium and benzylanilinium salts of a strong acid, such as sulfonic acid or disulfonic acid as thermal acid generators.
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