Electrode formation method, electrode and solar battery
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United States of America Patent
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Issued Date -
Oct 6, 2005
app pub date -
Jun 2, 2005
filing date -
Jun 4, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method for forming an electrode according to the present invention includes a step of discharging a paste containing an electrode material from a discharge port of a nozzle, and drawing a fine-line pattern on a surface of a semiconductor substrate, and a step of drying and baking the drawn fine-line pattern, and forming a fine-line electrode. Herein, in the drawing step, the nozzle is arranged so that a central axis of the nozzle is inclined at a predetermined inclination angle with respect to the surface of the semiconductor substrate, and so that the discharge port is proximate to the surface of the semiconductor substrate at a predetermined distance, the nozzle and the semiconductor substrate are moved relatively to each other in a drawing direction of the fine-line pattern, and relative movement speeds of the nozzle and the semiconductor substrate are adjusted, thereby drawing the fine-line pattern so that a line width of the fine-line pattern is smaller than an inner diameter of the discharge port of the nozzle.
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