Microfluidic system
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United States of America Patent
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Issued Date -
Oct 13, 2005
app pub date -
Apr 6, 2004
filing date -
Apr 6, 2004
priority date (Note) -
Abandoned
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Abstract
A system for measuring viscosity includes microfluidic passageways coupled to a micro-cavity, and semiconductive electrodes for applying an electric field across said electrodes. The resultant pressure increase and deflection of the diaphragm changes the capacitance of the MEMS capacitor. Pumps such as a thermal pump or a surface acoustic wave pump control flow of fluid to be measured to and from the micro-cavity. Semiconductor device fabrication techniques are employed to produce the viscosity measurement system.
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