Wireless substrate-like sensor
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United States of America Patent
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app pub date -
Mar 8, 2005
filing date -
Feb 6, 2002
priority date (Note) -
Abandoned
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Abstract
In accordance with an aspect of the present invention, a wireless substrate-like sensor is configured to ensure it does not contaminate a semiconductor processing chamber. The sensor is sealed except for one or more apertures. In one embodiment, a vent is disposed proximate the apertures. In another embodiment, the aperture is coupled to a pressure equalization member that deforms in response to a differential in pressure between the sensor interior and exterior.
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