Microelectromechanical structures, devices including the structures, and methods of forming and tuning same
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United States of America Patent
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app pub date -
Jun 6, 2005
filing date -
Oct 26, 2001
priority date (Note) -
Abandoned
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Abstract
A microelectromechanical structure and device and methods of forming and using the structure and device are disclosed. The structure includes a mechanical element, an ion conductor and a plurality of electrodes. Mechanical properties of the structure are altered by applying a bias across the electrodes. Such structures can be used to form devices such as resonators for RF applications.
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