Apparatus and method for the determination of positioning coordinates for semiconductor substrates
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United States of America Patent
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Issued Date -
Oct 13, 2005
app pub date -
Mar 18, 2005
filing date -
Apr 10, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus (2) and a method for the determination of positioning coordinates for at least one semiconductor substrate (6) are disclosed. A digital camera (11) for acquiring an image of the surface (4) of the semiconductor substrate (6) is provided. A computer system is provided, having a display (41) on which the image of the surface (4) of the semiconductor substrate (6) is presentable. By way of an input means (44), a user can mark at least one site (34) of interest on the surface (4) of the semiconductor substrate (6). A measuring machine (24) then automatically travels to the at least one defined site (34) and carries out the desired measurement or examination.
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