Importance

Loading Importance Indicators...

Abstract

A system for decontaminating a clean-room has an H.sub.2O.sub.2 supply device for supplying the clean-room with H.sub.2O.sub.2 and an H.sub.2O.sub.2 breakdown device for effecting a chemical breakdown of H.sub.2O.sub.2 without catalyst in the clean-room. The H.sub.2O.sub.2 breakdown device comprises a supply vessel filled with gaseous agent which can be introduced via a gas line into the clean-room where it reacts with the H.sub.2O.sub.2. A valve is placed in the gas line with which the amount of the gaseous agent introduced into the clean-room can be introduced under open-loop or closed-loop control. Owing to the fact that the excess H.sub.2O.sub.2, that is to say the H.sub.2O.sub.2 which has not reacted with other materials in the clean-room during the decontamination is broken down in the clean-room itself, it need not be flushed out completely from the clean-room first and broken down afterwards.

Loading the Abstract Image...

First Claim