Buffer system for a wafer handling system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
N/A
app pub date -
Feb 28, 2005
filing date -
Jan 17, 1999
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An apparatus is provided for supporting semiconductor wafer in a wafer processing system. The apparatus comprises at least two wafer support assemblies, defining respectively at least two wafer support levels and being mounted between opposing support beams; one or more supporting bases connected to or integral with each of the wafer support assemblies; and a motion unit coupled to the support beams.
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