Method a quartz sensor
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United States of America Patent
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Feb 21, 2006
Grant Date -
Oct 20, 2005
app pub date -
Apr 20, 2004
filing date -
Apr 20, 2004
priority date (Note) -
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Abstract
A quartz sensor method and system are disclosed in which a plurality of SAW sensing resonators can be mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate can thereafter be appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of SAW sensing resonators (e.g., pressure, reference and/or temperature SAW resonators) can then be located upon the quartz wafer substrate, which is based upon the previously mechanically simulated for implementation upon the substrate to thereby produce a quartz sensor package from the quartz wafer substrate.
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