Imaging semiconductor structures using solid state illumination
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United States of America Patent
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Dec 13, 2011
Grant Date -
Oct 20, 2005
app pub date -
Apr 19, 2005
filing date -
Apr 19, 2004
priority date (Note) -
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Abstract
The invention consists of a camera, light sources, lenses and software algorithms that are used to image and inspect semiconductor structures, including through infrared radiation. The use of various configurations of solid state lighting and software algorithms enhances the imaging and inspection.
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