Micro-electromechanical switch array
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United States of America Patent
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Issued Date -
Oct 27, 2005
app pub date -
Jan 27, 2005
filing date -
Jan 29, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Micro-electromechanical devices having an improved flexible layer enable the use of material having a wider range of elastic modulus. The MEM devices include a substantially non-pliable layer and a substantially flexible layer both of which include electrodes that when energized will create electrostatic forces that attracts the flexible layer to the non-pliable layer. The flexible layer has perforations or apertures cut into the flexible layer of a MEMs device to alter operational properties such as electrostatic sensitivity, resonance frequency, rate of change of sensitivity above the resonance frequency, oscillating mass, panel stiffness and others parameters.
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