Getter deposition for vacuum packaging
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United States of America Patent
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Issued Date -
Nov 17, 2005
app pub date -
Sep 2, 2004
filing date -
May 13, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A device package that includes a thin film getter that is deposited on an inside surfaces of a device receiving vacuum sealed cavity or chamber. The thin film getter is deposited using, for example, sputtering, resistive evaporation, e-beam evaporation, or any other suitable deposition technique.
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