Importance

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Abstract

A system for optical metrology of a biological sample comprising: a broadband light source; an optical assembly receptive to the broadband light, the optical assembly configured to facilitate transmission of the broadband light in a first direction and impede transmission of the broadband light a second direction; a sensing light path receptive to the broadband light from the optical assembly; a fixed reflecting device; a reference light path receptive to the broadband light from the optical assembly, the reference light path coupled with the sensing light path, the reference light path having an effective light path length longer than an effective light path length of the sensing light path by a selected length corresponding to about a selected target depth within the biological sample; and a detector receptive the broadband light resulting from interference of the broadband light to provide an electrical interference signal indicative thereof.

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First Claim