Apparatus, methods, and systems to detect an analyte based on changes in a resonant frequency of a spring element
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United States of America Patent
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Issued Date -
Dec 1, 2005
app pub date -
May 27, 2004
filing date -
May 27, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
According to some embodiments, a Microelectromechanical System (MEMS) sensor includes a sensing material on a spring element. The sensor may also include a detector adapted to determine a resonant frequency associated with the spring element, wherein the resonant frequency changes upon the exposure of the sensing material to an analyte.
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