Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing
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United States of America Patent
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Issued Date -
Dec 8, 2005
app pub date -
Jun 2, 2005
filing date -
Jun 3, 2004
priority date (Note) -
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Abstract
The present invention is directed to a method for dispensing a total volume of liquid on a substrate, the method including, inter alia, disposing a plurality of spaced-apart droplets on a region of the substrate, each having an unit volume associated therewith, with an aggregate volume of the droplets in the region being a function of a volume of a pattern to be formed thereat.
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