Apparatus for probing multiple integrated circuit devices
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United States of America Patent
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N/A
Issued Date -
Dec 22, 2005
app pub date -
Feb 15, 2005
filing date -
Jun 16, 2004
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The present probing apparatus includes a platform with a rectangular opening, two slides positioned at two sides of the opening in a parallel manner, at least one non-circular beam and at least one tunable stage positioned on the non-circular beam. The non-circular beam is preferably a rectangular beam with two ends positioned on the two slides through two first sliding bases, respectively. The tunable stage comprises a carrier for loading a probe card, a first driving module for adjusting a relative position along x-axis between the probe card and the device under test (DUT), a second driving module for adjusting a relative position along y-axis between the probe card and the DUT, a third driving module for adjusting a relative position along z-axis between the probe card and the DUT, and an angular adjusting module for adjusting an angle between the probe card and the DUT.
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