Photovoltaic cell, photovoltaic cell module, method of fabricating photovoltaic cell and method of repairing photovoltaic cell
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United States of America Patent
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Dec 29, 2009
Grant Date -
Dec 29, 2005
app pub date -
Jun 29, 2005
filing date -
Jun 29, 2004
priority date (Note) -
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Abstract
A plurality of first separation grooves are formed in a back electrode. Second separation grooves having a width smaller than that of the first separation grooves are formed by removing a second photovoltaic conversion layer and an intermediate reflective layer inside the first separation grooves. Third separation grooves having a width smaller than that of the second separation grooves are formed by removing a first photovoltaic conversion layer and a light reflective electrode inside the second separation grooves. Corners of the first photovoltaic conversion layer and corners of the second photovoltaic conversion layer that are exposed in the separation grooves are removed by performing plasma etching, so that the upper surfaces of side ends of the intermediate reflective layer are exposed.
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