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Abstract

A wavefront measurement system with a source of electromagnetic radiation and an illumination system that directs the electromagnetic radiation to a spatial light modulator to produce a diffraction pattern. A projection optical system projects an image of the spatial light modulator onto an image plane. A shearing grating is in the image plane. A detector receives a fringe pattern from the image plane. The spatial light modulator can generate a non-linear phase variation across it to scan the diffraction pattern across a pupil of the projection optical system. The spatial light modulator forms a synthetic grating. The spatial light modulator can be a transmissive-type or a reflective-type modulator. Pixels of the spatial light modulator form rulings of a synthetic grating that can have random variations of transmission and/or angular orientation within each ruling. The spatial light modulator can simulate lateral movement of the synthetic grating, or form a synthetic grating with different orientations of its rulings.

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First Claim