Structure of a micro electro mechanical system
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United States of America Patent
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Issued Date -
Jan 12, 2006
app pub date -
Oct 12, 2004
filing date -
Jul 9, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A structure of a micro electro mechanical system (MEMS) for a planar display apparatus is described. The MEMS structure used as a transmissible or reflective display device has a shielding electrode and a control electrode. The shielding electrode has a low stress electrode and a high stress electrode. The high stress electrode connected to the low stress electrode is a movable element. The control electrode is located below the high stress electrode. The control electrode attracts the high stress electrode when a voltage is applied to the control electrode. The high stress electrode deforms and the position of the low stress electrode is altered.
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