Plasma treatment apparatus and light detection method of a plasma treatment
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United States of America Patent
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Issued Date -
Jan 19, 2006
app pub date -
Jul 14, 2004
filing date -
Jul 14, 2004
priority date (Note) -
Abandoned
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Abstract
The subject of the invention is a plasma treatment apparatus and light detection method capable of detecting multiple optical signals obtained from multiple measurement locations and capable of analyzing condition of each of the measurement locations using an apparatus having the advantage of having a more simplified structure. Interference light L1 passes through optical fiber 222 and is transmitted to spectroscopic component 230. Plasma light L2 passes through optical fiber 224 and is transmitted to spectroscopic component 230. These lights separately undergo respective spectroscopic separation. Interference light spectrum L1g obtained by spectroscopic separation of interference light L1 passes through first light path 226 and strikes an interference light photoreception region of photoelectric conversion component 240. Plasma light spectrum L2g obtained by spectroscopic separation of plasma light L2 passes through second light path 228 and strikes a plasma light photoreception region of photoelectric conversion component 240.
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