Catalyst and method for decomposition of perfluoro-compound in waste gas
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United States of America Patent
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Issued Date -
Feb 2, 2006
app pub date -
Jun 2, 2003
filing date -
Sep 16, 2002
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a catalyst for the decomposition of exhausted perfluoro-compounds (PFCs) and a catalytic decomposition method of PFCs by using the same. More particularly, the present invention relates to a PFC decomposition catalyst prepared in such a manner that a surface of aluminum oxide is loaded with phosphorous (P) component at a aluminum/phosphorous mole ratio of 10 to 100 and a decomposition method of PFCs by using the catalyst. The present catalyst can be decomposed PFCs at 100% rate exhausted from semiconductor manufacturing industry and thus prevent the release of PFCs having high global warming potential into atmosphere.
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