Slotted thin-film sputter deposition targets for ferromagnetic materials

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Issued Date
Feb 16, 2006
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Aug 10, 2005
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Aug 16, 2004

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Abstract

A slotted sputtering target for a magnetron sputtering system for thin-film deposition particularly suited for ferromagnetic target materials such as cobalt, nickel, and iron or an alloy including more than one of these elements.

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Patent Owner	Address
WILLIAMS ADVANCED MATERIALS INC	2978 MAIN STREET BUFFALO NY 14214

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C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Grohman, Henry L	Wappingers Falls, NY	3	10
Willson, Matthew T	New Milford, CT	5	30

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Slotted thin-film sputter deposition targets for ferromagnetic materials

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11200930

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11200930

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