Circuit pattern inspection device and circuit pattern inspection method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
Mar 2, 2006
app pub date -
Nov 28, 2003
filing date -
Nov 30, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Disclosed is a circuit pattern inspection apparatus for inspecting a plurality of target patterns 15 arrange in lines at least at first and second opposite ends thereof. The inspection apparatus comprises a supply electrode 35 for supplying an inspection signal and a sensor electrode 25 for detecting a detection signal. Each of the supply and sensor electrodes 35, 25 are adapted to be moved across each of the target patterns with a given gap relative to each of the target patterns 15 in such a manner as to allow the inspection signal supplied from the supply electrode 35 to each of the target patterns 15 through a capacitive coupling, to be detected by the sensor electrode capacitively coupled with each of the target patterns 15, so that the presence of disconnection in the target pattern is determined when the detection signal has a value less than a given lower limit, and the presence of short circuit in the target pattern is determined when the detection signal has a value greater than a given upper limit. According to the inspection apparatus of the present invention, the presence of defect in a circuit board can be inspected reliably and readily.
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