Micromirrors and hinge structures for micromirror arrays in projection displays
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United States of America Patent
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Oct 14, 2008
Grant Date -
Mar 2, 2006
app pub date -
Aug 25, 2004
filing date -
Aug 25, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate held via a hinge on a substrate, the micromirror plate being attached to the hinge such that the micromirror plate can rotate along a rotation axis and the hinge structure is located between the micromirror plate and the light source. The mirror plate is formed between the hinge and the substrate on which the hinge is formed. As a result, the hinge is exposed to the incident light during the operation.
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