Method of improving removal rate of pads
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United States of America Patent
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Issued Date -
Mar 2, 2006
app pub date -
Aug 25, 2004
filing date -
Aug 25, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of improving a removal rate of a pad includes producing a body of a pad of polyurethane from a mix; and introducing into the mix an additive which decreases an elastic rebound of the pad so as to increase a chemical-mechanical planarization removal rate; and using as the additive a substance which at least contains starch.
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